Heterodyne Standing-Wave Interferometer with Improved Phase Stability
نویسندگان
چکیده
Abstract This paper describes a standing-wave interferometer with two laser sources of different wavelengths, diametrically opposed and emitting towards each other. The resulting standing wave has an intensity profile which is moving constant velocity, directly detected inside the beam by thin transparent photo sensors. first sensor at fixed position, serving as phase reference for second one moved along optical axis, in frequency shift, proportional to velocity. difference between both sensors evaluated purpose interferometric length measurements.
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ژورنال
عنوان ژورنال: Nanomanufacturing and Metrology
سال: 2021
ISSN: ['2520-811X', '2520-8128']
DOI: https://doi.org/10.1007/s41871-021-00098-3